Company Filing History:
Years Active: 2002
Title: Michael Shevelev: Innovator in Semiconductor Technology
Introduction
Michael Shevelev is a notable inventor based in Feasterville, PA (US). He has made significant contributions to the field of semiconductor technology, particularly through his innovative methods for forming ultra-shallow junctions in semiconductor devices. His work is characterized by a practical approach that emphasizes cost-effectiveness and efficiency.
Latest Patents
Michael holds 1 patent for his invention titled "Method and apparatus for forming ultra-shallow junction for semiconductor device." This patent describes a low-cost method for creating ultra-shallow junctions in semiconductor materials. The method involves an initial rapid thermal annealing (RTA) process that utilizes a heat source at a specific temperature and duration to eliminate lattice defects without causing significant diffusion of dopants. Following this, the semiconductor is exposed to electromagnetic radiation at a frequency corresponding to the resonance frequency of interstitial impurity ions. The intensity of the electric field is carefully selected to align with the activation barrier potential of the impurity ions, making this method applicable to various dopant materials.
Career Highlights
Michael is currently employed at Gyrotron Technology, Inc., where he continues to develop and refine his innovative techniques in semiconductor technology. His work has garnered attention for its potential to enhance the performance and reliability of semiconductor devices.
Collaborations
Michael collaborates with Vladislav Sklyarevich, contributing to advancements in their field through shared expertise and innovative ideas.
Conclusion
Michael Shevelev's contributions to semiconductor technology exemplify the impact of innovative thinking in engineering. His patent for forming ultra-shallow junctions represents a significant advancement in the field, showcasing his commitment to practical and efficient solutions.