Company Filing History:
Years Active: 2007-2012
Title: Innovations by Michael Peterson in Wafer Support Technology
Introduction
Michael Peterson is an accomplished inventor based in Victoria, MN (US). He has made significant contributions to the field of wafer support technology, holding 2 patents that showcase his innovative approach to solving industry challenges.
Latest Patents
One of Michael's latest patents is the Thin Wafer Insert. This invention is a plastic insert designed to provide support for thin wafers in wafer carriers that are configured for peripheral wafer support. The invention includes the insert itself, its combination with a wafer carrier, and the methods of supporting the thin wafers. In preferred embodiments, the insert utilizes tabs that fit into side wall recesses, creating an interference fit to secure the insert in place. The design features a top surface with multiple ribs positioned inwardly from the wafer periphery, allowing for minimal contact while supporting the wafers. Additionally, the lower surface of the insert has a strengthening structure that provides rigidity. The ribs on the top surface are oriented parallel to the insertion and withdrawal direction of the wafers, ensuring precise positioning while minimizing the amount of plastic used, thus reducing the weight of the insert.
Career Highlights
Michael Peterson is currently employed at Entegris, Inc., where he continues to develop innovative solutions in wafer support technology. His work has significantly impacted the efficiency and effectiveness of wafer handling in various applications.
Collaborations
Michael has collaborated with notable coworkers, including Brian Wiseman and Tony Simpson, contributing to a dynamic team focused on advancing technology in their field.
Conclusion
Michael Peterson's innovative work in wafer support technology exemplifies his commitment to enhancing industry standards. His patents reflect a deep understanding of the challenges faced in wafer handling, and his contributions continue to influence the field positively.