Michael James Grapperhaus

Title: Michael James Grapperhaus: Innovator in Ionized Physical Vapor Deposition

Introduction

Michael James Grapperhaus is a notable inventor based in Gilbert, AZ (US). He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of ionized physical vapor deposition (iPVD). With a total of 5 patents, Grapperhaus has established himself as a key figure in advancing technology for high aspect ratio submicron features on semiconductor substrates.

Latest Patents

Grapperhaus's latest patents include innovative methods and apparatuses for ionized physical vapor deposition. One of his notable inventions is an iPVD apparatus that is programmed to deposit material into high aspect ratio submicron features on semiconductor substrates. This apparatus cycles between deposition and etch modes within a vacuum chamber, operating at different power and pressure parameters. For instance, a pressure of more than 50 mTorr is utilized for sputtering material from a target, while lower pressures are used for etching. The alternating etching modes effectively remove overhanging material and resputter it onto the sidewalls of the features. Additionally, the substrate is cooled during these processes to enhance performance.

Another significant patent involves a method of apparatus for ionized physical vapor deposition, particularly useful for sputtering conductive metal coating material from an annular magnetron sputtering target. This method generates a dense plasma in the processing space, allowing for optimized film deposition rates and uniformity. The design includes a Faraday type shield to prevent unwanted coating on the dielectric window while maintaining effective energy coupling.

Career Highlights

Grapperhaus is currently employed at Tokyo Electron Limited, where he continues to innovate in the field of semiconductor technology. His work has been instrumental in developing advanced deposition techniques that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Throughout his career, Grapperhaus has collaborated with esteemed colleagues such as Glyn J Reynolds and John Stephen Drewery. These partnerships have contributed to the advancement of technology in the semiconductor industry.

Conclusion

Michael James Grapperhaus is a prominent inventor whose work in ionized physical vapor deposition has significantly impacted semiconductor manufacturing. His innovative patents and contributions to the field continue to drive advancements in technology.