Company Filing History:
Years Active: 2001-2005
Title: Innovations by Michael J Meyer
Introduction
Michael J Meyer is an accomplished inventor based in Tempe, AZ (US). He has made significant contributions to the field of wafer holder design, holding a total of 3 patents. His work focuses on improving the efficiency and functionality of wafer support systems.
Latest Patents
One of his latest patents is the "Self-centering wafer support system." This invention discloses improvements in the design of a low mass wafer holder. The enhancements include the use of peripherally located, integral lips to space a wafer or other substrate above the base plate of the wafer holder. A uniform gap is thus provided between the wafer and the base plate, which tempers rapid heat exchanges, allows gas to flow between the wafer and wafer holder during pick-up, and keeps the wafer holder thermally coupled with the wafer. At the same time, thermal disturbance from lip contact with the wafer is reduced. Gas flow during pick-up can be provided through radial channels in a wafer holder upper surface or through backside gas passages. A thicker ring is provided at the wafer holder perimeter, and in some embodiments, it is an independent piece to accommodate stresses accompanying thermal gradients. Self-centering mechanisms are also provided to keep the wafer holder centered relative to a spider that is subject to differential thermal expansion.
Career Highlights
Michael J Meyer is currently employed at Asm America, Inc., where he continues to innovate in the field of semiconductor manufacturing. His expertise in wafer holder design has positioned him as a key contributor to advancements in this technology.
Collaborations
He has collaborated with notable coworkers, including Ivo Johannes Raaijmakers and Loren R Jacobs, who have also contributed to the field of semiconductor technology.
Conclusion
Michael J Meyer is a prominent inventor whose work in wafer holder design has led to significant advancements in the semiconductor industry. His innovative patents reflect his commitment to improving technology and efficiency in this critical field.