Company Filing History:
Years Active: 2000
Title: Michael J Gatto: Innovator in Semiconductor Technology
Introduction
Michael J Gatto is a prominent inventor based in Austin, TX, known for his contributions to semiconductor technology. With a total of 2 patents, Gatto has made significant advancements in the field, particularly in process monitoring and contact structure formation.
Latest Patents
Gatto's latest patents include a methodology for improved semiconductor process monitoring using optical emission spectroscopy (OES). This innovative method allows for the monitoring of specific parameters within a plasma process tool chamber by determining the intensity of two wavelengths present in the plasma. The first wavelength varies significantly with the parameter being monitored, while the second wavelength remains stable over time. This technique can generate reliable alarm signals for etch stop conditions and indicate oxide etch rates.
Another notable patent involves a method of forming low resistance contact structures in vias arranged between interconnect levels. This process includes the formation of an anti-reflective layer on interconnect lines and the use of a dry etch process to ensure clean via areas, allowing for better adherence of plug materials.
Career Highlights
Michael J Gatto is currently employed at Advanced Micro Devices Corporation, where he continues to push the boundaries of semiconductor technology. His work has been instrumental in enhancing the efficiency and reliability of semiconductor manufacturing processes.
Collaborations
Gatto has collaborated with notable colleagues such as Fred N Hause and Kuang-Yeh Chang, contributing to a dynamic environment of innovation and research within his field.
Conclusion
Michael J Gatto's contributions to semiconductor technology through his patents and work at Advanced Micro Devices Corporation highlight his role as a key innovator in the industry. His methodologies not only improve process monitoring but also enhance the formation of contact structures, showcasing his impact on the future of semiconductor manufacturing.