Michael J DeChellis

Title: Michael J DeChellis: A Pioneer in Integrated Fluid Delivery Systems

Introduction

Michael J DeChellis is an innovative inventor based in Austin, Texas. With a strong background in semiconductor processing technologies, he has contributed significantly to the field with his patents focused on fluid delivery systems. His work has improved the efficiency and functionality of semiconductor manufacturing processes, making a considerable impact in the industry.

Latest Patents

Michael holds two notable patents that showcase his expertise. The first patent is for the manufacture of an integrated fluid delivery system for semiconductor processing apparatus. This invention presents a space-conserving design that enhances gas distribution in semiconductor processing equipment. The integrated fluid flow network architecture involves a layered substrate containing fluid flow channels, along with various fluid handling and monitoring components. Notably, the layered substrate is diffusion bonded, and the integration level of its components can vary based on design and material requirements.

The second patent is for a diaphragm valve with a dynamic metal seat and coned disk springs. This compact integrated fluid control valve is essential for managing process fluids in semiconductor operations. The valve features a design where process fluids enter through multiple entrance ports and exit via an annular metallic valve seat. In this system, a sliding cylinder controls the valve's operation, with the balance of pneumatic pressure and spring force determining the extent of valve opening.

Career Highlights

Currently, Michael is employed by Applied Materials, Inc., a leading company in the semiconductor manufacturing equipment sector. His innovative contributions have played a vital role in the advancement of technologies used in semiconductor processing. With a focus on efficient fluid delivery systems, Michael continues to influence the future of manufacturing processes.

Collaborations

Throughout his career, Michael has worked alongside esteemed colleagues including Mark A Crockett and John William Lane. These collaborations have furthered advancements in fluid delivery technologies and have made significant contributions to their respective projects within the semiconductor field.

Conclusion

Michael J DeChellis exemplifies the spirit of innovation in semiconductor processing through his patents and collaborative efforts. His work not only enhances the current capabilities of semiconductor manufacturing but also paves the way for future developments in this critical field. With his dedication to innovation and efficiency, Michael continues to be a valuable asset to the industry.