Company Filing History:
Years Active: 2006
Title: Michael Ioannou: Innovator in Wafer Scanning Technology
Introduction
Michael Ioannou is a notable inventor based in Acton, MA (US). He has made significant contributions to the field of scanning technology, particularly with his innovative approach to wafer processing. His work is characterized by a focus on enhancing the efficiency and effectiveness of substrate scanning mechanisms.
Latest Patents
Michael Ioannou holds a patent for a Wafer 2D scan mechanism. This invention is directed to a scanning apparatus and method for processing a substrate. The scanning apparatus comprises a base portion and a rotary subsystem. The rotary subsystem includes a first link with a first joint, which is rotatably coupled to the base portion, and a second link with a second joint, which is rotatably coupled to the first link. The first and second joints are spaced a predetermined distance apart. The second link features an end effector where the substrate resides, and this end effector is operably coupled to the second link. The design allows for a linear oscillation of the end effector along a linear first scan path, ensuring that the rotational velocity of the first and second links does not cross zero.
Career Highlights
Michael Ioannou is currently employed at Axcelis Technologies, Inc., where he continues to develop and refine innovative technologies in the semiconductor industry. His work has been instrumental in advancing the capabilities of wafer scanning systems, contributing to improved manufacturing processes.
Collaborations
Michael has collaborated with notable colleagues such as Mehran Asdigha and Joseph Ferrara. Their combined expertise has fostered a productive environment for innovation and development within their field.
Conclusion
Michael Ioannou's contributions to wafer scanning technology exemplify the spirit of innovation in the semiconductor industry. His patent for the Wafer 2D scan mechanism showcases his commitment to enhancing substrate processing methods. Through his work at Axcelis Technologies, Inc., he continues to push the boundaries of technology and improve manufacturing efficiency.