Newbury Park, CA, United States of America

Michael E Fossey


Average Co-Inventor Count = 3.0

ph-index = 8

Forward Citations = 286(Granted Patents)


Location History:

  • Forest Grove, OR (US) (1987)
  • Woodland Hills, CA (US) (2000)
  • Charlotte, NC (US) (1996 - 2001)
  • Newbury Park, CA (US) (2000 - 2003)

Company Filing History:


Years Active: 1987-2003

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8 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Michael E. Fossey

Introduction

Michael E. Fossey is a notable inventor based in Newbury Park, California, recognized for his impactful contributions to the field of technology. With a remarkable portfolio of seven patents, Fossey has made significant strides, particularly in the realm of wafer inspection systems. His innovations have enhanced the way defects on silicon wafers are detected and analyzed, showcasing his commitment to advancing technological processes.

Latest Patents

Among his latest inventions is a sophisticated wafer inspection system designed to distinguish between pits and particles on the surface of a workpiece. This innovative surface inspection method enables the detection of defects such as particles or pits on silicon wafers, a crucial aspect of semiconductor manufacturing. The system features an inspection station where a scanner scans the workpiece's surface using a beam of P-polarized light. By analyzing the angular distribution of the light scattered from the wafer, the system successfully differentiates between particle defects and pit defects, significantly improving defect detection accuracy.

Career Highlights

Fossey has had a fruitful career, contributing his expertise to various organizations, including Ade Optical Systems Corporation and Sentrol, Inc. His work in these companies has not only enhanced their technological capabilities but also solidified his reputation as an innovator in the field. The insights gained from these experiences have informed his development of advanced inspection systems and techniques.

Collaborations

Throughout his career, Fossey has collaborated with esteemed colleagues such as Lee Dante Clementi and John C. Stover. These partnerships have fostered an environment of innovation and creativity, enabling the development of cutting-edge technologies that push the boundaries of current capabilities in the industry.

Conclusion

Michael E. Fossey stands out as a significant contributor to the engineering and technology domains. With his seven patents and a focus on improving wafer inspection processes, he embodies the spirit of innovation that drives progress in this competitive field. His career serves as an inspiration for aspiring inventors and a testament to the importance of collaboration in achieving groundbreaking advancements.

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