Michael Carl Drymon

Title: Michael Carl Drymon: Innovator in Semiconductor Technology

Introduction

Michael Carl Drymon is a notable inventor based in Tracy, California. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to etching processes.

Latest Patents

One of his latest patents is titled "Self Limiting Lateral Atomic Layer Etch." This patent describes methods and apparatuses for laterally etching semiconductor substrates using an atomic layer etch process. The process involves exposing an oxidized surface of a semiconductor substrate to a fluorine-containing etch gas while heating the substrate to remove non-volatile etch byproducts through a sublimation mechanism. Additionally, the methods include pulsing a hydrogen-containing gas alongside the fluorine-containing etch gas. The apparatuses also feature an ammonia mixing manifold designed for the separate preparation and mixing of ammonia for use in various tools.

Career Highlights

Michael Carl Drymon is currently employed at Lam Research Corporation, a leading company in the semiconductor industry. His work focuses on advancing etching technologies that are crucial for the fabrication of semiconductor devices.

Collaborations

Throughout his career, Drymon has collaborated with talented individuals such as Tom A Kamp and Neema Rastgar, contributing to the development of innovative solutions in semiconductor processing.

Conclusion

Michael Carl Drymon's contributions to semiconductor technology through his patents and work at Lam Research Corporation highlight his role as a key innovator in the field. His advancements in etching processes continue to influence the industry significantly.