Company Filing History:
Years Active: 2023-2024
Title: Meenakshi Mamunuru: Innovator in Substrate Processing Systems
Introduction
Meenakshi Mamunuru is a distinguished inventor based in Tigard, Oregon. She has made significant contributions to the field of substrate processing systems, particularly in gas delivery systems. With a total of 2 patents to her name, her work showcases her expertise and innovative spirit.
Latest Patents
One of her latest patents focuses on substrate processing systems that include a gas delivery system with reduced dead legs. This innovative gas delivery system features a 2-port valve, which includes a first valve located between a first port and a second port. Additionally, a 4-port valve is incorporated, which has a first node connected to both the first and second ports. A bypass path is strategically placed between the third and fourth ports, with a second node located along this bypass path. Furthermore, a second valve is positioned between the first and second nodes. The manifold block defines gas flow channels that are configured to connect the first port of the 4-port valve to a first inlet, the second port of the 4-port valve to the first port of the 2-port valve, the third port of the 4-port valve to a second inlet, the second port of the 2-port valve to a first outlet, and the fourth port of the 4-port valve to a second outlet.
Career Highlights
Meenakshi is currently employed at Lam Research Corporation, where she continues to push the boundaries of innovation in her field. Her work has been instrumental in advancing technologies related to substrate processing.
Collaborations
Throughout her career, Meenakshi has collaborated with notable colleagues, including Ramesh Chandrasekharan and Antonio Xavier. These collaborations have further enriched her contributions to the industry.
Conclusion
Meenakshi Mamunuru is a remarkable inventor whose work in substrate processing systems has made a significant impact. Her innovative patents and collaborations highlight her dedication to advancing technology in her field.