Company Filing History:
Years Active: 2007-2013
Title: Mayuka Iwasaki: Innovator in Electron Microscopy and Charged Particle Beam Technology
Introduction
Mayuka Iwasaki is a prominent inventor based in Yokohama, Japan. She has made significant contributions to the field of electron microscopy and charged particle beam technology. With a total of 6 patents to her name, her work has advanced the capabilities of measurement and evaluation in various applications.
Latest Patents
One of her latest patents is an "Electron microscope system and method for evaluating film thickness reduction of resist patterns." This invention provides a system for achieving detection and measurement of film thickness reduction of a resist pattern with high throughput, which can be applied to part of in-line process management. By considering the fact that film thickness reduction of the resist pattern leads to some surface roughness, a film thickness reduction index value is calculated by quantifying the degree of roughness on an electron microscope image. The amount of film thickness reduction is estimated by applying the calculated index value to a pre-existing database.
Another notable patent is the "Charged particle beam device." This device enables the prevention of degradation of reproducibility of measurement caused by an increase in beam diameter attributed to an image shift. It features a function that addresses device-to-device variation. The charged particle beam device is used for measuring the dimensions of a pattern on a specimen by detecting secondary charged particles emitted when scanned with a primary charged particle beam. A lookup table is prepared in advance to correct the line profile for variations in beam diameter, ensuring excellent reproducibility in measurements.
Career Highlights
Mayuka Iwasaki is currently employed at Hitachi High-Technologies Corporation, where she continues to innovate and develop advanced technologies. Her work has been instrumental in enhancing the precision and reliability of measurement techniques in her field.
Collaborations
She has collaborated with notable coworkers, including Chie Shishido and Hiroki Kawada, contributing to the advancement of their shared projects and innovations.
Conclusion
Mayuka Iwasaki's contributions to electron microscopy and charged particle beam technology exemplify her dedication to innovation. Her patents reflect her commitment to improving measurement techniques, making her a significant figure in her field.
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