Burlington, VT, United States of America

Matthew Kilpatrick Miller


Average Co-Inventor Count = 3.3

ph-index = 4

Forward Citations = 90(Granted Patents)


Company Filing History:


Years Active: 1998-1999

where 'Filed Patents' based on already Granted Patents

4 patents (USPTO):

Title: Innovations by Inventor Matthew Kilpatrick Miller

Introduction

Matthew Kilpatrick Miller, based in Burlington, Vermont, is a prolific inventor known for his contributions to the field of semiconductor polishing technology. Holding four patents, Miller is recognized for his innovative approaches that enhance the efficiency and effectiveness of chemical-mechanical polishing processes.

Latest Patents

Among his latest inventions, Miller developed a patent related to the "Slurry Injection Technique for Chemical-Mechanical Polishing." This apparatus is designed to optimize the polishing of semiconductor wafers by utilizing a wafer carrier that exerts force against the wafer and a rotating polishing pad. The innovation incorporates a polishing slurry distributor that delivers a precise spray of slurry, allowing for better polishing while using significantly less material than traditional methods. Another noteworthy patent is the "Vertical Polishing Device and Method," which presents a CMP machine featuring a vertically-oriented polishing surface and integrated slurry delivery mechanism. This development not only minimizes the machine's footprint but also addresses contamination issues that may arise in the polishing device.

Career Highlights

Matthew Kilpatrick Miller is currently employed at International Business Machines Corporation (IBM), where he continues to push the boundaries of polishing technology in semiconductor manufacturing. His work significantly contributes to the efficiency and reliability of semiconductor fabrication processes.

Collaborations

Miller has collaborated with notable colleagues in his field, including Matthew J. Rutten and Erick G. Walton. Together, they contribute to the collective advancement of polishing technologies, enhancing the performance and sustainability of semiconductor manufacturing.

Conclusion

Matthew Kilpatrick Miller exemplifies the spirit of innovation in the semiconductor industry. Through his exceptional patents and collaborative efforts, he is paving the way for advancements that not only improve manufacturing processes but also set new standards in technology. His work at IBM stands as a testament to the vital role of inventors in shaping the future of technology.

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