Matthew G Hankins

Title: Innovations by Matthew G Hankins

Introduction

Matthew G Hankins is a notable inventor based in Albuquerque, NM (US). He has made significant contributions to the field of microelectromechanical systems (MEMS) through his innovative patents. With a total of 2 patents, Hankins has focused on enhancing the performance and reliability of MEMS devices.

Latest Patents

Hankins' latest patents include a "Redox buffered hydrofluoric acid etchant for the reduction of galvanic attack during release etching of MEMS devices having noble material films." This invention utilizes etchant solutions comprising a redox buffer to minimize damage to the structural layers of MEMS devices that incorporate noble material films. The preferred redox buffer consists of a soluble thiophosphoric acid, ester, or salt, which maintains the electrochemical potential of the etchant solution, preventing oxidation of the structural material. This sacrificial redox buffer protects the exposed structural layers while allowing for the dissolution of sacrificial oxide layers during the release etch.

Another significant patent is the "Anti-stiction coating for microelectromechanical devices." This method involves depositing an anti-stiction coating on a MEMS device by reacting the vapor of an amino-functionalized silane precursor with the silicon surface of the device in a vacuum chamber. The process includes cleaning the silicon surface to create a clean hydroxylated silicon surface before the reaction. The amino-functionalized silane precursor is highly reactive with the silicon surface, eliminating the need for a post-process anneal step and enabling the reaction to occur at low pressure. This vapor-phase deposition results in a uniform surface morphology and strong adhesion to the silicon surface.

Career Highlights

Hankins is currently employed at Sandia Corporation, where he continues to innovate in the field of MEMS technology. His work has been instrumental in advancing the capabilities of MEMS devices, making them more efficient and reliable.

Collaborations

Some of his notable coworkers include Thomas M Mayer and David R Wheeler, who have collaborated with Hankins on various projects within Sandia Corporation.

Conclusion

Matthew G Hankins is a distinguished inventor whose work has significantly impacted the MEMS industry. His innovative patents demonstrate his commitment to enhancing technology and improving device performance.