Matthew Eric Kovacic

Title: The Innovative Contributions of Matthew Eric Kovacic

Introduction

Matthew Eric Kovacic is a notable inventor based in Reno, NV, who has made significant contributions to the field of gas flow control systems. With a total of three patents to his name, Kovacic's work focuses on enhancing the efficiency and reliability of gas delivery systems, particularly in semiconductor fabrication processes.

Latest Patents

Kovacic's latest patents include a "Flow control system, method, and apparatus," which describes a gas flow control system designed to deliver multiple gas flows. This innovative system features a gas flow path that extends from a gas inlet to two gas outlets, incorporating first and second flow restrictors and valves. When both valves are fully open, the gas flows are split according to the impedances of the flow restrictors. Another significant patent is the "Laminar flow restrictor and seal for same," which outlines apparatuses essential for controlling gas flow in semiconductor fabrication. This invention emphasizes the importance of flow restrictors that provide a known flow impedance, constructed from multiple layers with specific flow passages.

Career Highlights

Kovacic is currently employed at Ichor Systems, Inc., where he continues to develop innovative solutions in gas flow technology. His expertise in this area has positioned him as a valuable asset to his company and the industry at large.

Collaborations

Throughout his career, Kovacic has collaborated with talented individuals such as Zachariah Ezekiel McIntyre and Sean Joseph Penley. These partnerships have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Matthew Eric Kovacic's contributions to gas flow control systems exemplify the impact of innovation in the semiconductor industry. His patents reflect a commitment to improving technology and enhancing operational efficiency.