The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2025
Filed:
Oct. 05, 2023
Ichor Systems, Inc., Fremont, CA (US);
Daniel T. Mudd, Reno, NV (US);
Marshall B. Grill, Reno, NV (US);
Norman L. Batchelor, Ii, Sparks, NV (US);
Sean Joseph Penley, Sparks, NV (US);
Michael Maeder, Reno, NV (US);
Patti J. Mudd, Reno, NV (US);
Zachariah Ezekiel Mcintyre, Houston, TX (US);
Tyler James Wright, Reno, NV (US);
Matthew Eric Kovacic, Reno, NV (US);
Christopher Bryant Davis, Georgetown, TX (US);
ICHOR SYSTEMS, INC., Fremont, CA (US);
Abstract
A gas flow control system for delivering a plurality of gas flows. The gas flow control system has a gas flow path extending from a gas inlet to first and second gas outlets. First and second flow restrictors are operably coupled to the gas flow path. First and second valves are operably coupled to the gas flow path such that when both first and second valves are in a fully open state, flows of gas from the first and second gas outlets are split according to the impedances of the first and second flow restrictors.