This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Lam Research Corporation. Active years: 2025.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2025
Title: Matthew Claussen: Innovator in Sensor Technology
Introduction
Matthew Claussen is an accomplished inventor based in Santa Clara, CA. He has made significant contributions to the field of sensor technology, particularly in the area of substrate processing systems. His innovative work has led to the development of a unique patent that enhances the efficiency and effectiveness of temperature monitoring.
Latest Patents
Matthew Claussen holds a patent for an "RF immune sensor probe for monitoring a temperature of an electrostatic chuck of a substrate processing system." This sensor probe features an elongated body that defines an inner cavity with a specific inner diameter. A printed circuit board is designed to fit within this inner cavity, housing a first temperature-sensing integrated circuit mounted at one end. Additionally, a cap is attached to the first end of the elongated body, adjacent to the temperature-sensing integrated circuit. The housing is configured to receive the second end of the elongated body, allowing it to be mounted to a baseplate of a substrate support. This innovative design is crucial for improving temperature monitoring in advanced manufacturing processes.
Career Highlights
Matthew Claussen is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to apply his expertise in sensor technology to real-world applications, contributing to the advancement of substrate processing systems.
Collaborations
Matthew has collaborated with talented coworkers such as Siyuan Tian and Yuma Ohkura. Their combined efforts have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Matthew Claussen's contributions to sensor technology exemplify the spirit of innovation in the semiconductor industry. His patent and work at Lam Research Corporation highlight his commitment to advancing technology for improved manufacturing processes.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile