Matsuda Yozo

Title: Matsuda Yozo: Innovator in EUV Technology

Introduction

Matsuda Yozo is a prominent inventor based in Suwon-si, South Korea. He is known for his contributions to the field of extreme ultraviolet (EUV) technology. His innovative work has led to advancements in inspection apparatuses that are crucial for the semiconductor industry.

Latest Patents

Matsuda holds a patent for an "EUV collector inspection apparatus and inspection method." This apparatus includes a light blocking cover that shields the front surface of an EUV collector, creating a space where external light is blocked. It features a pillar-shaped light source that extends along the central axis of the EUV collector, capable of outputting irradiated light across the ultraviolet (UV) to visible light (VIS) spectrum. Additionally, a spectrometer is positioned above the light source to detect the spectrum of reflected light from the EUV collector's surface. This technology allows for the inspection of contamination states on the collector's front surface based on the reflected light spectrum.

Career Highlights

Matsuda is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of innovation in EUV technology. His work is vital in enhancing the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Matsuda collaborates with talented colleagues, including Jongbin Park and Jeonggil Kim. Their combined expertise contributes to the development of cutting-edge technologies in the field.

Conclusion

Matsuda Yozo's contributions to EUV technology exemplify the importance of innovation in the semiconductor industry. His patent for the EUV collector inspection apparatus showcases his commitment to advancing technology and improving manufacturing processes.