Mathew Last

Title: Mathew Last - Innovator in MEMS Device Fabrication

Introduction

Mathew Last is a notable inventor based in San Diego, CA. He has made significant contributions to the field of Micro-Electro-Mechanical Systems (MEMS) through his innovative patent. His work focuses on the fabrication processes that enhance the functionality and efficiency of MEMS devices.

Latest Patents

Mathew Last holds a patent for a "Process for fabricating MEMS devices." This invention outlines a method for creating MEMS devices with movable and stationary comb teeth. The process utilizes a single mask to define the location and width of both types of comb teeth, ensuring their self-alignment. The MEMS devices are constructed from a multi-layer semiconductor structure, incorporating both semiconductor and insulator materials. A preferred embodiment of this process is applied to develop a MEMS mirror device, which features a movable structure, a movable frame, torsional members, and comb drives.

Career Highlights

Throughout his career, Mathew Last has demonstrated a commitment to advancing MEMS technology. His innovative approach to device fabrication has positioned him as a key figure in the industry. With a focus on precision and efficiency, he continues to explore new methodologies that push the boundaries of what is possible in MEMS design.

Collaborations

Mathew has collaborated with several talented individuals in his field, including John K Gritters and Ezekiel John Joseph Kruglick. These partnerships have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.

Conclusion

Mathew Last's contributions to MEMS device fabrication exemplify the spirit of innovation. His patent and collaborative efforts highlight the importance of advancing technology in this dynamic field. Through his work, he continues to inspire future generations of inventors and engineers.