This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Lam Research Corporation. Active years: 2025.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2025
Title: Mathew Dennis Evans: Innovator in RF Technology
Introduction
Mathew Dennis Evans is a notable inventor based in Montreal, Canada. He has made significant contributions to the field of radio frequency (RF) technology, holding 2 patents that showcase his innovative approach to solving complex problems in this domain.
Latest Patents
One of his latest patents is titled "Systems and methods for compensating for RF power loss." This invention describes methods for conducting a no plasma test to determine resistance associated with an output of an impedance matching circuit. After this test, a substrate is processed in a plasma chamber, where power loss is determined and used to adjust the power delivered by an RF generator. This adjustment stabilizes power loss, facilitating a uniform process for the substrate and others in the plasma chamber.
Another significant patent is "Method and system for automated frequency tuning of radiofrequency (RF) signal generator for multi-level RF power pulsing." This invention defines a two-dimensional frequency search grid to optimize the operating frequency setpoints of an RF signal generator in different operational states. The RF signal generator operates in a multi-level RF power pulsing mode, and an automated search process is performed to determine optimum values for both operational states.
Career Highlights
Mathew Evans is currently employed at Lam Research Corporation, where he continues to develop innovative solutions in RF technology. His work has had a substantial impact on the efficiency and effectiveness of RF systems.
Collaborations
Throughout his career, Mathew has collaborated with talented individuals such as Ying Wu and Cristofer Addison Flowers. These collaborations have further enhanced his contributions to the field.
Conclusion
Mathew Dennis Evans is a distinguished inventor whose work in RF technology has led to valuable patents that address critical challenges in the industry. His innovative spirit and collaborative efforts continue to drive advancements in this important field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile