Location History:
- Yao, JP (1990 - 1992)
- Osaka, JP (1988 - 2001)
Company Filing History:
9 out of 21,351 
5 out of 11 
2 out of 4 Years Active: 1988-2001
Title: The Innovative Contributions of Masuo Tada
Introduction
Masuo Tada is a prominent inventor known for his significant contributions to air purification technologies. He is based in Yao, Japan, and holds a total of 11 patents. His work primarily focuses on methods for producing super clean air, which is essential for various industrial applications, particularly in semiconductor manufacturing.
Latest Patents
Tada's latest patents include a method for producing super clean air that effectively removes chemical components such as hydrocarbons, organic halogens, acidic gases, basic gases, aldehydes, nitrogen oxides, and water vapor. This method achieves concentrations of these components at no more than 1 ppb and maintains a dew point lower than -40°C. The process involves low-temperature adsorption treatment in stages, utilizing temperatures ranging from -40°C to -180°C. The air collected from the atmosphere undergoes a pretreatment step to eliminate moisture and carbon dioxide before being subjected to a series of low-temperature adsorption treatments. This innovative approach ensures the production of super clean air suitable for processing semiconductor wafers.
Another notable patent involves a method and apparatus for producing super clean air that is efficient for use in tunnel-type wafer transport systems. This method reduces specific energy consumption while improving yield by utilizing cooling energy and gas produced in a low-temperature separation nitrogen-producing apparatus. The process includes multiple stages of adsorption treatment, resulting in super clean air with a dew point not higher than -100°C.
Career Highlights
Throughout his career, Masuo Tada has worked with notable companies, including Mitsubishi Electric Corporation and Taiyo Sanso Co., Ltd. His expertise in air purification technologies has made a significant impact on the industry, particularly in enhancing the quality of air used in semiconductor manufacturing processes.
Collaborations
Tada has collaborated with esteemed colleagues such as Takaaki Fukumoto and Toshiaki Ohmori. These collaborations have further advanced the development of innovative air purification technologies.
Conclusion
Masuo Tada's contributions to the field of air purification are invaluable, particularly in the context of semiconductor manufacturing. His innovative methods for producing super clean air demonstrate his commitment to advancing technology and improving industrial processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.