This inventor holds 1 USPTO granted patent. Top assignee: Sumitomo Osaka Cement Co., Ltd.. Active years: 2022.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2022
Title: Masayuki Shiojiri: Innovator in Electrostatic Chuck Technology
Introduction
Masayuki Shiojiri is a prominent inventor based in Tokyo, Japan. He is known for his contributions to the field of electrostatic chuck devices, which are essential in various manufacturing processes, particularly in the semiconductor industry. His innovative approach has led to the development of a unique patent that enhances the efficiency and effectiveness of these devices.
Latest Patents
Masayuki Shiojiri holds a patent for an electrostatic chuck device and its manufacturing method. This device features a mounting table with a mounting surface, a focus ring, and a cooling element. The design includes a holding portion that surrounds the mounting surface, which has an annular groove portion with a through-hole. The holding portion's inner and outer peripheral surfaces are strategically designed to hold the focus ring, ensuring optimal performance. The patent outlines specific conditions that the holding surface must satisfy, including the inclination of the holding surface and the leak areas of the inner and outer peripheral surfaces.
Career Highlights
Shiojiri is associated with Sumitomo Osaka Cement Co., Ltd., where he has made significant contributions to the development of advanced manufacturing technologies. His work has been instrumental in improving the functionality and reliability of electrostatic chuck devices, which are critical in precision applications.
Collaborations
Throughout his career, Masayuki Shiojiri has collaborated with notable colleagues, including Keisuke Maeda and Masaki Ozaki. These partnerships have fostered innovation and have led to advancements in the technology surrounding electrostatic chuck devices.
Conclusion
Masayuki Shiojiri's contributions to the field of electrostatic chuck technology exemplify the impact of innovative thinking in manufacturing processes. His patent and collaborative efforts continue to influence the industry, showcasing the importance of advancements in technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile