Company Filing History:
Years Active: 1997-2022
Title: Masaya Sakurai: Innovator in Epitaxial Growth Technology
Introduction
Masaya Sakurai is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, particularly in the development of devices that enhance the epitaxial growth process. With a total of 7 patents to his name, Sakurai's work has had a substantial impact on the industry.
Latest Patents
One of Sakurai's latest patents is for a susceptor and epitaxial growth device. This invention provides a susceptor capable of preventing scratches on the back surface of a wafer caused by lift pins. It also reduces unevenness in the in-surface temperature distribution of the wafer. The design includes a susceptor main body and a plate-shaped member that supports the central part of the back surface of the wafer during conveyance. Another notable patent involves a lift pin for an epitaxial growth apparatus, which prevents damage to the back surface of a silicon wafer and minimizes dust emission due to friction against the wall surface of a through hole in a susceptor. This innovative lift pin features a straight trunk part, a head part that abuts the silicon wafer, and a cover part made of a carbon-based material.
Career Highlights
Throughout his career, Masaya Sakurai has worked with notable companies such as Sumco Corporation and Oki Electric Industry Co., Ltd. His experience in these organizations has allowed him to refine his expertise in semiconductor manufacturing and epitaxial growth technologies.
Collaborations
Sakurai has collaborated with several talented individuals in the field, including Takayuki Dohi and Shinji Nakahara. These partnerships have contributed to the advancement of his innovative projects and patents.
Conclusion
Masaya Sakurai's contributions to the semiconductor industry through his patents and collaborations highlight his role as a key innovator in epitaxial growth technology. His work continues to influence advancements in the field, showcasing the importance of innovation in technology development.
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