Company Filing History:
Years Active: 2002
Title: Masatoshi Hisatome: Innovator in RF Plasma Technology
Introduction
Masatoshi Hisatome is a prominent inventor based in Yokohama, Japan. He is known for his contributions to the field of RF plasma technology, particularly in the development of discharge electrodes. His innovative work has led to advancements in uniform film deposition processes, which are crucial for various industrial applications.
Latest Patents
Hisatome holds a patent for a "Discharge electrode, RF plasma generation apparatus using the same, and power supply method." This invention features a unique design where a plurality of electrode bars are arranged in parallel, with side electrode bars connected to the corresponding opposite ends. This configuration forms a ladder-like RF discharge electrode. The power supply points are arranged axisymmetrically with respect to a reference line, which helps in suppressing voltage distribution on the ladder electrode. This innovation significantly enhances the uniformity of discharge distribution, allowing for consistent film deposition rates, even in large-area applications.
Career Highlights
Masatoshi Hisatome is associated with Mitsubishi Heavy Industries Limited, where he has made significant contributions to the company's research and development efforts. His work has been instrumental in advancing technologies that are essential for modern manufacturing processes.
Collaborations
Hisatome has collaborated with notable colleagues, including Hideo Yamakoshi and Kengou Yamaguchi. These collaborations have further enriched his research and have contributed to the success of various projects within the company.
Conclusion
Masatoshi Hisatome's innovative work in RF plasma technology exemplifies the impact of dedicated inventors in advancing industrial processes. His contributions continue to influence the field and pave the way for future innovations.