Masataka Kado

Title: Innovations by Masataka Kado in Laser Plasma Technology

Introduction

Masataka Kado is an accomplished inventor based in Orlando, FL. He has made significant contributions to the field of laser plasma technology, particularly in the development of high repetition-rate laser plasma target source systems. With a total of 2 patents, Kado's work is at the forefront of advancements in lithography systems.

Latest Patents

Kado's latest patents include innovative systems for producing soft x-rays. One of his notable inventions is the "Water Laser Plasma X-Ray Point Sources." This system utilizes ice crystals that are irradiated by a laser and lithography system. The target source system features a liquid tank source and freezer that freezes microscopic particles into crystal shapes. These particles are then projected by a nozzle jet from a high repetition rate liquid-droplet injector into the path of a flashing laser beam, resulting in the production of soft x-rays of approximately 11.7 nm and 13 nm. Uncollected and unshot target crystals are collected and reliquified by a heater source for recycling back to the liquid tank source. An auxiliary source and detector system can also be incorporated for instantaneous triggering of the laser beam. This technology can be integrated into well-known EUV lithography systems for wafer chip production.

Another patent, titled "Water Laser Plasma X-Ray Point Source and Apparatus," describes a similar high repetition-rate laser plasma target source system. This system also includes a liquid tank source and freezer, which freezes microscopic particles into crystal shapes. The process is similar, producing soft x-rays of approximately 13 nm. The uncollected target crystals are again collected and reliquified for recycling.

Career Highlights

Masataka Kado is affiliated with the University of Central Florida Research Foundation Inc., where he continues to innovate and develop cutting-edge technologies. His work has significantly impacted the field of lithography and x-ray production.

Collaborations

Kado collaborates with notable colleagues, including Kai Gabel and Feng Jin, who contribute to his research and development efforts.

Conclusion

Masataka Kado's contributions to laser plasma technology and lithography systems are noteworthy. His innovative patents reflect his commitment to advancing the field and improving production processes in semiconductor manufacturing.