Masashi Wada

Title: Masashi Wada: Innovator in Charged Particle Beam Technology

Introduction

Masashi Wada is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of charged particle beam technology, holding three patents that showcase his innovative approach to enhancing measurement systems and operational methods.

Latest Patents

Wada's latest patents include a "Measurement system and method of setting parameter of charged particle beam device." This invention focuses on a method for setting parameters of a charged particle beam device, aimed at reducing the time required to adjust an ABCC parameter. The system utilizes an inverse conversion processing unit to generate a simulator input signal corresponding to an electron emitted from a sample. A simulation detector employs an arithmetic model to execute processing on the simulator input signal, reflecting characteristic information in an arithmetic parameter. The simulated image conversion unit then processes the signal from the simulation detector into a simulated image. An ABCC search unit searches for an ABCC parameter to ensure that the evaluation value from the simulated image meets a specified reference value, outputting the ABCC parameter to the ABCC control unit of the actual machine.

Another notable patent is the "Charged particle beam device and operation method therefor." This invention addresses the challenges of adjusting optical axes in a multi-beam charged particle beam device, where parameters of optical systems are inter-dependent. Wada's design includes an optical parameter setting unit for configuring parameters of optical systems that emit multiple primary charged particle beams to a sample. The device features detectors for detecting secondary charged particle beams, memories for storing detected signals as digital images, and evaluation value derivation units for deriving evaluation values from these images. A user-friendly GUI displays images and evaluation results, allowing real-time changes to various optical parameters.

Career Highlights

Masashi Wada is currently employed at Hitachi High-Tech Corporation, where he continues to develop innovative technologies in the field of charged particle beams. His work has significantly advanced the capabilities of measurement systems and operational methods in this specialized area.

Collaborations

Wada collaborates with esteemed colleagues such as Wen Zheng Li and Hiroshi Oinuma, contributing to a dynamic research environment that fosters innovation and technological advancement.

Conclusion

Masashi Wada's contributions to charged particle beam technology exemplify his commitment to innovation and excellence. His patents reflect a deep understanding of complex systems and a drive to improve operational efficiency in scientific