Masaru P Rao

Title: Innovations in Microfabrication by Masaru P Rao

Introduction

Masaru P Rao is an accomplished inventor based in Santa Barbara, California. He has made significant contributions to the field of microfabrication, particularly in the development of methods for creating complex metallic structures.

Latest Patents

Masaru P Rao holds a patent for a "Three-dimensional metal microfabrication process and devices produced thereby." This invention relates to a method for three-dimensional (3D) microfabrication of complex, high aspect ratio structures with arbitrary surface height profiles in metallic materials. The method builds upon previously developed anisotropic deep etching techniques, enabling the realization of intricate, non-prismatic geometries composed of multiple height levels and sloping or non-planar surface profiles. The utility of this approach is exemplified in the fabrication of sloping electrode structures intended for use in bulk micromachined titanium micromirror devices. However, this method has potential applications in various microactuator, microsensor, microtransducer, or microstructure devices.

Career Highlights

Masaru P Rao is affiliated with the University of California, where he continues to advance research in microfabrication technologies. His work has garnered attention for its innovative approach and practical applications in the field.

Collaborations

Masaru P Rao has collaborated with notable colleagues, including Marco F Aimi and Noel C MacDonald, contributing to the advancement of microfabrication techniques.

Conclusion

Masaru P Rao's contributions to the field of microfabrication highlight the importance of innovation in developing advanced technologies. His patent and ongoing research at the University of California demonstrate his commitment to pushing the boundaries of what is possible in this area.