Location History:
- Chiba, JP (2011 - 2015)
- Tokyo, JP (1993 - 2017)
Company Filing History:
Years Active: 1993-2017
Title: Innovations of Masaru Ohto in Semiconductor Cleaning Technologies
Introduction
Masaru Ohto is a prominent inventor based in Tokyo, Japan, known for his significant contributions to the field of semiconductor cleaning technologies. With a total of 10 patents to his name, Ohto has developed innovative solutions that address critical challenges in semiconductor manufacturing.
Latest Patents
Ohto's latest patents include a cleaning liquid composition, a method for cleaning semiconductor elements, and a method for manufacturing semiconductor elements. The cleaning liquid composition aims to suppress damage to low-dielectric constant interlayer dielectric films and wiring materials, such as copper or copper alloys. It effectively removes organosiloxane thin films, dry etching residues, and photoresists from treatment target surfaces in semiconductor device production. The composition contains specific percentages of quaternary ammonium hydroxide, potassium hydroxide, water-soluble organic solvents, and pyrazoles. Additionally, his cleaning method utilizes a liquid containing hydrogen peroxide and other components to remove hard masks and residues without corroding sensitive materials.
Career Highlights
Masaru Ohto is currently associated with Mitsubishi Gas Chemical Company, Inc., where he continues to innovate in the semiconductor cleaning sector. His work has been instrumental in enhancing the efficiency and effectiveness of cleaning processes in semiconductor manufacturing.
Collaborations
Ohto has collaborated with notable colleagues, including Hiroshi Matsunaga and Kenji Shimada, to further advance the field of semiconductor technology.
Conclusion
Masaru Ohto's contributions to semiconductor cleaning technologies demonstrate his commitment to innovation and excellence in the field. His patents reflect a deep understanding of the complexities involved in semiconductor manufacturing and provide valuable solutions for the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.