Location History:
- Tokyo, JP (1994 - 1996)
- Ohta, JP (1996)
- Utsunomiya, JP (1997 - 2011)
Company Filing History:
Years Active: 1994-2011
Title: The Innovative Contributions of Masaru Nyui
Introduction
Masaru Nyui is a prominent inventor based in Utsunomiya, Japan. He has made significant contributions to the field of optical engineering, particularly in the development of exposure apparatuses and polishing methods. With a total of 14 patents to his name, Nyui's work has had a substantial impact on the manufacturing processes in the semiconductor industry.
Latest Patents
One of Nyui's latest patents is an exposure apparatus and device manufacturing method. This innovative apparatus includes an illumination optical system designed to illuminate a reticle using light from a light source. It also features a projection optical system that projects the pattern of the reticle onto a substrate. The exposure apparatus is unique in that it exposes the substrate through a liquid supplied to the space between the substrate and the lens of the projection optical system. The lens has a polished surface on the side where light does not pass, enhancing the precision of the exposure process.
Another notable patent is a polishing apparatus and polishing method. This invention allows for the quick measurement of the thickness of a surface to be polished. By obtaining two-dimensional images from light reflected off the surface, the apparatus specifies the location for thickness observation and carries out the measurement efficiently.
Career Highlights
Masaru Nyui is currently associated with Canon Kabushiki Kaisha, a leading company in imaging and optical products. His work at Canon has allowed him to push the boundaries of technology in the field of optics and manufacturing.
Collaborations
Throughout his career, Nyui has collaborated with notable colleagues, including Mikichi Ban and Takehiko Suzuki. These collaborations have further enriched his work and contributed to the advancements in their shared field of expertise.
Conclusion
Masaru Nyui's innovative contributions to optical engineering and his impressive portfolio of patents underscore his importance in the industry. His work continues to influence the development of advanced manufacturing techniques, making him a key figure in the realm of inventions.