Yamanashi, Japan

Masaru Aomori


Average Co-Inventor Count = 7.0

ph-index = 2

Forward Citations = 17(Granted Patents)


Location History:

  • Nirasaki, JP (2002)
  • Yamanashi, JP (2004)

Company Filing History:

goldMedal2 out of 832,843 
Other
 patents

Years Active: 2002-2004

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2 patents (USPTO):Explore Patents

Title: **Innovator Masaru Aomori: Advancing Cleaning Technologies**

Introduction

Masaru Aomori is a distinguished inventor based in Yamanashi, Japan, known for his contributions in the field of cleaning processes and technology. With a noteworthy portfolio comprising two patents, Aomori's innovations aim to enhance the efficiency and effectiveness of industrial cleaning applications.

Latest Patents

Aomori’s latest patents include an **Apparatus and Method for Detecting an End Point of a Cleaning Process** and a **Vapor-Phase Processing Method Capable of Eliminating Particle Formation**. The first patent introduces an innovative cleaning end point detecting apparatus that utilizes cleaning gases to create cluster clouds and detach particles within a reaction chamber. It employs an irradiating unit to direct a laser beam onto the cluster cloud, generating a scattered laser beam, which is then monitored as two-dimensional image information. This allows for accurate determination of when the cleaning process is complete, specifically when no detached particles or cluster clouds are detected.

In his second patent, Aomori outlines a vapor-phase processing method designed to process substrates without causing particle formation. This involves determining the allowable margins of process conditions and ensuring that the chosen parameters remain within these limits during the production process. The method employs optical beam technology to facilitate the detection of scattering, enhancing the precision and quality of substrate processing.

Career Highlights

Throughout his inventive career, Masaru Aomori has focused on developing technologies that minimize contamination during manufacturing processes. His patents reflect a commitment to solving complex challenges in industrial cleaning and processing technologies, which are critical in sectors requiring high standards of cleanliness, such as semiconductor manufacturing.

Collaborations

Masaru Aomori collaborates with talented colleagues Natsuko Ito and Tsuyoshi Moriya, whose expertise complements his innovative efforts. Together, they work on further enhancing the effectiveness of cleaning technologies, contributing to advancements in their field.

Conclusion

Through his innovative patents and collaborative efforts, Masaru Aomori continues to make significant strides in enhancing cleaning processes and reducing contamination in industrial environments. His dedication to innovation illustrates the vital role of inventors in advancing technology and improving manufacturing standards.

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