Masao Ikuno

Title: Masao Ikuno: Innovator in Semiconductor Manufacturing

Introduction

Masao Ikuno is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patent that addresses exposure processes in this critical industry.

Latest Patents

Ikuno holds a patent titled "Method for compensating exposure value for exposure process in semiconductor manufacturing system." This patent describes a method for determining an exposure value for exposing a resist film. The process involves estimating size variations of a resist pattern from a predetermined target size based on the waiting time of the currently processing resist film. It also includes compensating a reference exposure value based on the size variation to obtain a compensated exposure value. This innovation is crucial for enhancing the precision and efficiency of semiconductor manufacturing.

Career Highlights

Masao Ikuno is associated with NEC Electronics Corporation, where he has been instrumental in advancing semiconductor technologies. His work has not only contributed to the company's success but has also had a lasting impact on the industry as a whole.

Collaborations

Ikuno has collaborated with notable colleagues, including Masahiko Kishi and Masaaki Yomo. These partnerships have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Masao Ikuno's contributions to semiconductor manufacturing through his innovative patent demonstrate his expertise and commitment to advancing technology. His work continues to influence the industry and inspire future innovations.