Masamichi Kurokawa

Title: Masamichi Kurokawa: Innovator in Substrate Processing Technology

Introduction

Masamichi Kurokawa is a notable inventor based in Kakegawa, Japan. He has made significant contributions to the field of semiconductor manufacturing through his innovative approaches to substrate processing. His work has led to advancements that are crucial for the development of modern electronic devices.

Latest Patents

Kurokawa holds a patent for a substrate processing method, substrate processing apparatus, method of manufacturing semiconductor devices, and a non-transitory computer-readable recording medium. This patent outlines a substrate processing method that includes loading a substrate into a processing vessel with a pre-baked film containing a silazane bond. The method involves heating the substrate to a first temperature, supplying a process gas, and then heating the substrate to a second temperature that is higher than the first but less than or equal to the temperature at which the pre-bake has been performed. This innovative approach enhances the efficiency and effectiveness of semiconductor device manufacturing.

Career Highlights

Throughout his career, Kurokawa has worked with prominent companies in the electronics industry. He has been associated with Hitachi Kokusai Electric Inc. and Az Electronic Materials (Luxembourg) S.a.r.l. His experience in these organizations has allowed him to refine his skills and contribute to significant technological advancements.

Collaborations

Kurokawa has collaborated with esteemed colleagues such as Masahisa Okuno and Tooru Kakuda. These partnerships have fostered an environment of innovation and have led to the development of cutting-edge technologies in the semiconductor field.

Conclusion

Masamichi Kurokawa's contributions to substrate processing technology have made a lasting impact on the semiconductor industry. His innovative methods and collaborative efforts continue to influence advancements in electronic device manufacturing.