Masamichi Kishimoto

Title: Masamichi Kishimoto – Innovator in Wafer Lithography Technology

Introduction

Masamichi Kishimoto, an accomplished inventor based in Yokkaichi, Japan, holds a significant patent in the field of wafer lithography equipment. His innovative contributions have enhanced the manufacturing processes within the semiconductor industry, paving the way for more efficient circuit pattern transfers onto wafers.

Latest Patents

Kishimoto's latest patent focuses on wafer lithography equipment, which includes an exposure unit that transfers a circuit pattern onto a wafer. The system features a measurement unit that measures the dimensions of the circuit pattern, along with a sophisticated calculator. This calculator is designed to compute a first difference, which is determined by comparing a first dimension, derived from a specific exposure amount and focus distance, with a second dimension measured by the measurement unit. Moreover, the calculator calculates a second difference, representing the aggregate of the first differences across all circuit patterns. Kishimoto’s invention also enables the calculation of an optimized second exposure amount and focus distance to minimize discrepancies between real measurements and the approximate response surface function. Ultimately, it also computes a correction exposure amount to refine the process further.

Career Highlights

Masamichi Kishimoto is currently employed at Toshiba Memory Corporation, where he continues to develop and refine technologies crucial to the semiconductor manufacturing process. His expertise and innovations have made a profound impact on the efficiency and precision of wafer lithography techniques, proving invaluable in an industry that demands high precision and reliability.

Collaborations

Throughout his career, Kishimoto has collaborated with notable colleagues, including Kazufumi Shiozawa and Toshihide Kawachi. These collaborations have fostered a rich environment for innovation, allowing for the exchange of ideas and expertise that drive advancements in wafer lithography and semiconductor technology.

Conclusion

Masamichi Kishimoto’s contributions to the field of wafer lithography equipment exemplify the impact of innovation in the semiconductor sector. His patent highlights not only his technical acumen but also his commitment to advancing technology that supports the global electronics and technology industries. Through his work at Toshiba Memory Corporation and his collaborations with esteemed colleagues, Kishimoto continues to shape the future of manufacturing processes, ensuring high-quality production standards in semiconductor technology.