Mito, Japan

Masamichi Kawano


Average Co-Inventor Count = 5.0

ph-index = 2

Forward Citations = 15(Granted Patents)


Company Filing History:


Years Active: 1994-1995

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2 patents (USPTO):Explore Patents

Title: Masamichi Kawano: Innovator in Charged Particle Beam Technology

Introduction

Masamichi Kawano, an accomplished inventor based in Mito, Japan, has made significant contributions to the field of charged particle beam technologies. With a total of two patents to his name, Kawano has demonstrated a strong commitment to innovation in this specialized area.

Latest Patents

Kawano's latest inventions include advanced charged particle beam exposure apparatuses. The first patent details a device that features an irradiator for directing a charged particle beam at a sample. It includes an analog controller responsible for the beam’s analog control, alongside a digital controller that communicates with the analog controller via a digital transmission path. Notably, the analog controller is situated inside a designated room, while the digital controller remains external to this space.

His second patent showcases a column section housed within a thermostatic chamber, located in a clean room. This design features an analog control section for each part of the column that is placed within the clean room, while the digital control section is positioned outside of it, ensuring optimal environmental conditions for operation.

Career Highlights

Masamichi Kawano has held key positions at notable companies such as Hitachi, Ltd. and Hitachi Instrument Engineering Co., Ltd. His tenure at these organizations has played a significant role in his development as an inventor in the field of charged particle beam technology.

Collaborations

Throughout his career, Kawano has collaborated with talented professionals such as Masahide Okumura and Haruo Yoda. These partnerships have likely enriched his innovative processes and contributed to the successful development of his patents.

Conclusion

Masamichi Kawano is a prominent figure in the realm of charged particle beam technologies. With his innovative patents and collaborations, he continues to push the boundaries of what is possible, establishing a legacy that will impact the industry for years to come.

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