Hitachi, Ltd.

Hitachi Instrument Engineering Co., Ltd.

Masamichi Kawano

Haruo Yoda

Masahide Okumura

Yukinobu Shibata

Tadao Konishi

A charged particle beam exposure apparatus includes an irradiator for irradiating a sample with a charged particle beam, an analog controller for analog controlling the charged particle beam, a digital controller for digital controlling the analog controller, and a digital transmission path connecting the analog controller to the digital controller. The analog controller is disposed inside a room, and the digital controller is disposed outside the room.

Charged particle beam exposure apparatus

A column section is disposed within a thermostatic chamber within a clean room, a section for analog controlling each portion of the column section is disposed within the clean room and outside of the thermostatic chamber, and a section for digital controlling the analog control section is disposed outside of the clean room.

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Mito, Japan

Masamichi Kawano