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Masami Seki

This inventor holds 7 USPTO granted patents. Top assignee: Nikon Corporation. Active years: 1997-2001.

USPTO Granted Patents = 7

% Patents Active = 100.0

Average Co-Inventor Count = 3.5

ph-index = 6

Forward Citations = 134(Granted Patents)

Company Filing History:

Nikon Corporation

Years Active: 1997-2001

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7 patents (USPTO):Sort by Forward CitationsExplore Patents

1. RE37361 - Scanning type exposure apparatus and exposure method (2001-09-11),

2. 6204912 - Exposure method, exposure apparatus, and mask (2001-03-20),

3. 5959784 - Optical projection systems and projection-exposure apparatus comprising (1999-09-28),

4. 5640227 - Exposure apparatus and exposure method for minimizing defocusing of the (1997-06-17),

5. 5625436 - Scanning type exposure apparatus and exposure method (1997-04-29),

6. 5614988 - Projection exposure apparatus and method with a plurality of projection (1997-03-25),

7. 5602620 - Scanning exposure apparatus and exposure method (1997-02-11),

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