Masaki Kitsunezuka

Title: Masaki Kitsunezuka: Innovator in Plasma Processing Technology

Introduction

Masaki Kitsunezuka is a prominent inventor based in Sapporo, Japan. He has made significant contributions to the field of plasma processing technology, holding two patents that showcase his innovative approach to monitoring and operating plasma tools.

Latest Patents

Kitsunezuka's latest patents include a method for data fusion of multiple sensors. This method provides a way to monitor a plasma-related process in a plasma tool by measuring data associated with the process using various sensors. The data collected from each sensor is processed to output individual wafer states, which are then integrated to determine the overall wafer state. His second patent focuses on the autonomous operation of plasma processing tools. This method involves executing a plasma process on a wafer while measuring associated data with multiple sensors. It includes a post-process fault detection mechanism to ensure the wafer state remains within a target range, allowing for immediate fault correction if necessary.

Career Highlights

Kitsunezuka is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in advancing the capabilities of plasma processing tools, enhancing their efficiency and reliability.

Collaborations

He collaborates with notable colleagues such as Jun Shinagawa and Chungjong Lee, contributing to a dynamic team focused on innovation in plasma technology.

Conclusion

Masaki Kitsunezuka's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the field. His advancements continue to influence the industry and improve manufacturing processes.