Masahito Goto

Title: **Masahito Goto: A Pioneer in Metallic Wiring Technology**

Introduction

Masahito Goto is a notable inventor based in Tenri, Japan, recognized for his contributions to the field of semiconductor technology and metallic wiring. With three patents to his name, Goto has made significant advancements that enhance the efficiency and performance of electronic devices.

Latest Patents

Among Goto's latest patents is a method for producing a metallic wiring board. This innovative process involves implanting nitrogen on the surface of a substrate, followed by the formation of a metallic film primarily composed of tantalum (Ta) or niobium (Nb) through a sputtering method. The resulting metallic wiring is then patterned, and an insulating film is created via anodic oxidation. Remarkably, this method ensures that Ta or Nb ions do not penetrate the substrate while still integrating doped nitrogen into the tantalum film. Consequently, a high-quality α-Ta layer is achieved, providing a specific resistance of approximately 25 µΩ.cm.

Another significant patent by Goto involves a semiconductor device and its production method. This device includes an insulating substrate and an electrode wiring made from materials like Ta and Nb alloys. The production process entails forming a nitrogen-doped Nb layer on the insulating substrate and subsequently patterning it to create the electrode wiring. An oxide film is then formed on a portion of the electrode wiring through anodization, enhancing its functionality.

Career Highlights

Goto is affiliated with Sharp Kabushiki Kaisha Corporation, a key player in the electronics industry known for its commitment to innovation and quality. His work in the corporation has allowed him to delve deeply into semiconductor technologies and contribute valuable patents that reflect his expertise in the field.

Collaborations

Throughout his career, Masahito Goto has collaborated closely with esteemed colleagues such as Yasunori Shimada and Hiroshi Morimoto. These partnerships have fostered a collaborative environment that enhances research and development processes, leading to groundbreaking innovations in semiconductor technology.

Conclusion

Masahito Goto stands out as a prominent inventor in the realm of metallic wiring and semiconductor devices. His patents not only showcase his technical prowess but also illustrate his significant impact on future technological advancements. Through his ongoing work at Sharp Corporation and collaborations with fellow innovators, Goto continues to push the boundaries of what is possible in electronics.