The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 1995
Filed:
Jul. 07, 1993
Masahito Goto, Tenri, JP;
Hiroshi Morimoto, Kitakatsuragi, JP;
Yasunori Shimada, Nara, JP;
Takayoshi Nagayasu, Nara, JP;
Mitsuaki Hirata, Tenri, JP;
Yoshitaka Hibino, Nara, JP;
Tomohiko Yamamoto, Tenri, JP;
Sharp Kabushiki Kaisha, Osaka, JP;
Abstract
A metallic wiring board includes nitrogen implanted in a surface of a substrate or a protective layer including nitrogen formed on the substrate upon which is formed a metallic film including, as a main component, one of Ta and Nb. An insulating film covering the metallic wiring is formed by anodic oxidation. The nitrogen in the substrate or the protective layer prevents Ta (or Nb) ions from entering the substrate during the anodic oxidation of the metallic wiring. As a result, insulating properties of the substrate are not degraded during the oxidation.