Masahiro Matsui

Title: Masahiro Matsui: Innovator in Semiconductor Technology

Introduction

Masahiro Matsui is a prominent inventor based in Shizuoka, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving the performance and reliability of semiconductor devices.

Latest Patents

Matsui's latest patents include innovative methods for producing semiconductor substrates. One notable patent describes a method for creating a silicon-on-insulator (SOI) substrate. This process involves epitaxially growing a first silicon layer on an insulating underlay, followed by ion implantation to create an amorphous interface. The silicon layer is then annealed to recrystallize, and heat treatment is applied to oxidize part of the surface. After etching away the silicon oxide, a second silicon layer is grown on the remaining first silicon layer. This method results in a SOI substrate with minimal crystal defect density and excellent surface flatness, enabling the realization of high-performance electronic and optical devices.

Another patent focuses on the production of silicon-on-sapphire (SOS) substrates. In this process, a silicon layer is grown on a sapphire substrate, followed by heat treatment in an oxidizing atmosphere. The resulting silicon oxide layer is removed, and a silicon layer is regrown homoepitaxially. This innovative approach enhances the quality of the semiconductor substrate.

Career Highlights

Matsui has worked with notable companies in the semiconductor industry, including Asahi Kasei Corporation and Asahi Kasei Kogyo Corporation. His experience in these organizations has contributed to his expertise in semiconductor technology and innovation.

Collaborations

Throughout his career, Matsui has collaborated with esteemed colleagues such as Takashi Morishita and Yoshitaka Moriyasu. These partnerships have fostered a collaborative environment that has led to advancements in semiconductor research and development.

Conclusion

Masahiro Matsui's contributions to semiconductor technology through his innovative patents and collaborations have significantly impacted the industry. His work continues to pave the way for advancements in electronic and optical devices, showcasing the importance of innovation in this field.