Masahiko Oka

Title: Masahiko Oka: Innovator in Plasma Processing Technology

Introduction

Masahiko Oka is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of a unique patent that enhances the efficiency of processing chambers.

Latest Patents

Masahiko Oka holds a patent for a focus ring and plasma processing apparatus. This invention features a focus ring that is detachably attached to the top surface of an outer peripheral portion of a mounting table in a processing chamber. The design includes an annular main body with a back surface that adheres to the mounting table. Additionally, a thermally conductive sheet is fixed to the annular main body, which improves thermal management during processing. The thermally conductive sheet is secured to the annular main body through a vulcanization process, ensuring a robust and efficient design.

Career Highlights

Oka is associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to focus on advancing plasma processing technologies. With 1 patent to his name, he has established himself as a key player in this specialized field.

Collaborations

Throughout his career, Masahiko Oka has collaborated with esteemed colleagues such as Nobuyuki Nagayama and Naoyuki Satoh. These partnerships have fostered innovation and contributed to the development of cutting-edge technologies in the industry.

Conclusion

Masahiko Oka's contributions to plasma processing technology exemplify the spirit of innovation. His patent for the focus ring and plasma processing apparatus showcases his commitment to enhancing efficiency in semiconductor manufacturing. Oka's work continues to influence the field, making him a significant figure in the world of inventions.