Company Filing History:
Years Active: 2025
Title: Marvin Clayton Brees: Innovator in Semiconductor Processing Technologies
Introduction
Marvin Clayton Brees is a notable inventor based in Boulder Creek, California. He has made significant contributions to the field of semiconductor processing, holding a total of 2 patents. His work focuses on enhancing the efficiency and control of gas flow in chemical delivery systems.
Latest Patents
Brees' latest patents include "Sublimation control using downstream pressure sensing" and "Heater design solutions for chemical delivery systems." The first patent describes a system that controls gas flow by utilizing an ampoule to store a solid precursor. This system features a heater that sublimates the solid precursor into a gaseous form, along with a mass flow controller that regulates the flow to a substrate processing chamber. A pressure sensor measures the pressure of the gaseous precursor, allowing a controller to apply power to the electric heater based on closed-loop control principles. The second patent outlines a semiconductor substrate processing apparatus that includes a chemical isolation chamber and a chemical delivery module. This module generates process gas using a heated precursor and includes a control module that adjusts the heating temperature based on the temperature of the gas line.
Career Highlights
Marvin Brees is currently employed at Lam Research Corporation, where he continues to innovate in the semiconductor industry. His work has been instrumental in developing advanced technologies that improve the efficiency of semiconductor manufacturing processes.
Collaborations
Brees has collaborated with notable colleagues such as Davinder Sharma and Christopher J Rau, contributing to various projects that enhance semiconductor processing technologies.
Conclusion
Marvin Clayton Brees is a distinguished inventor whose work in semiconductor processing has led to significant advancements in the field. His patents reflect a commitment to innovation and efficiency in chemical delivery systems.