This inventor holds 1 USPTO granted patent. Top assignee: Novellus Systems Incorporated. Active years: 2000.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2000
Title: Martin N Scales: Innovator in Wafer Alignment Technology
Introduction
Martin N Scales is a notable inventor based in San Jose, California. He has made significant contributions to the field of semiconductor processing, particularly in the area of wafer alignment technology. His innovative approach has led to the development of a unique apparatus that enhances the efficiency of wafer processing.
Latest Patents
Martin N Scales holds a patent for an "Apparatus for aligning substrate to chuck in processing chamber." This invention features a passive mechanism designed to center a wafer on a chuck in relation to a backside exclusion gas ring. The apparatus includes a series of wheels that are rotatably mounted in a circular pattern on the chuck's top surface. The design allows the wafer to self-center due to its weight, as it contacts the wheels upon placement. This innovative mechanism improves the precision of wafer alignment during processing.
Career Highlights
Martin N Scales is currently employed at Novellus Systems Incorporated, a company known for its advancements in semiconductor manufacturing technology. His work at Novellus has positioned him as a key player in the development of innovative solutions for the semiconductor industry.
Collaborations
Throughout his career, Martin has collaborated with several talented individuals, including David A Pechin and Jeffrey C Benzing. These collaborations have contributed to the advancement of technology in the field and have fostered a culture of innovation within the teams he has worked with.
Conclusion
Martin N Scales is a distinguished inventor whose work in wafer alignment technology has made a significant impact on the semiconductor industry. His innovative patent demonstrates his commitment to enhancing processing efficiency and precision.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
