Martin Freeborn

Title: Martin Freeborn: Innovator in Plasma Ignition Technology

Introduction

Martin Freeborn is a notable inventor based in Santa Cruz, California. He has made significant contributions to the field of physical vapor deposition (PVD) processes. His innovative work focuses on enhancing plasma ignition performance, which is crucial for various industrial applications.

Latest Patents

Freeborn holds a patent for a system designed to improve plasma ignition performance for low-pressure PVD processes. The patent describes a plasma ignition system that includes a first voltage supply, which selectively provides a plasma ignition voltage and a plasma maintenance voltage across an adapter ring and a cathode target of a PVD system. Additionally, a second voltage supply is utilized to supply a second voltage across the adapter ring and an anode ring of the PVD system. The plasma ignition control module plays a vital role by igniting plasma using the plasma ignition voltage and the auxiliary plasma ignition voltage. Once the plasma is ignited, it maintains the plasma using the plasma maintenance voltage while ceasing the supply of the ignition voltages.

Career Highlights

Martin Freeborn is currently employed at Novellus Systems Incorporated, where he continues to develop and refine technologies related to PVD processes. His expertise in plasma systems has positioned him as a key player in the advancement of this technology.

Collaborations

Freeborn collaborates with various professionals in his field, including his coworker Vince Burkhart. Their combined efforts contribute to the innovative projects at Novellus Systems.

Conclusion

Martin Freeborn's contributions to plasma ignition technology exemplify the impact of innovation in industrial processes. His patent and ongoing work at Novellus Systems highlight the importance of advancements in PVD technology.