Martin E Freeborn

Title: Martin E Freeborn: Innovator in Plasma Processing Technology

Introduction

Martin E Freeborn is a notable inventor based in San Jose, CA. He has made significant contributions to the field of plasma processing technology, holding a total of 3 patents. His work focuses on developing advanced apparatuses and methods for deposition and etch processes.

Latest Patents

One of Martin's latest patents is titled "Apparatus and method for deposition and etch in gap fill." This invention provides apparatuses and methods for performing deposition and etch processes in an integrated tool. The apparatus includes a plasma processing chamber that functions as a capacitively-coupled plasma reactor. It features a showerhead with a top electrode and a pedestal with a bottom electrode. The design allows for an RF hardware configuration that enables the RF generator to power the top electrode in deposition mode while powering the bottom electrode in etch mode. Additionally, the apparatus can include switches to connect an HFRF generator to the showerhead in deposition mode, while both the HFRF and LFRF generators connect to the pedestal, grounding the showerhead in etch mode.

Career Highlights

Martin E Freeborn is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His innovative work has contributed to advancements in plasma processing technology, enhancing the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Throughout his career, Martin has collaborated with talented individuals such as Akhil N Singhal and Patrick A Van Cleemput. These collaborations have fostered a creative environment that promotes innovation and technological advancement.

Conclusion

Martin E Freeborn is a distinguished inventor whose work in plasma processing technology has led to significant advancements in the field. His contributions continue to impact the semiconductor industry positively.