Martin Deehan

Title: Martin Deehan: Innovator in Plasma Cleaning Technology

Introduction

Martin Deehan is a notable inventor based in Pleasanton, CA (US). He has made significant contributions to the field of plasma cleaning technology, holding a total of 2 patents. His work focuses on developing innovative methods and apparatuses that enhance the efficiency of plasma cleaning processes.

Latest Patents

One of Martin Deehan's latest patents is a plasma cleaning apparatus and method. This invention includes an apparatus designed for plasma cleaning, featuring a lid body with a first surface that faces a pedestal during the cleaning process. The second surface of the lid body is parallel to the first and contains an indentation for a magnet assembly. The method involves several steps, including removing a sputtering target from the processing chamber, sealing the chamber, introducing gas, applying an RF bias to the pedestal, and maintaining a constant temperature to effectively clean the pedestal.

Career Highlights

Martin Deehan is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work at Applied Materials has allowed him to further develop his expertise in plasma cleaning technologies and contribute to advancements in the field.

Collaborations

Throughout his career, Martin has collaborated with talented individuals such as Matt Cheng-Hsiung Tsai and Nan Lu. These collaborations have fostered innovation and have been instrumental in the development of his patented technologies.

Conclusion

Martin Deehan's contributions to plasma cleaning technology exemplify his dedication to innovation and advancement in the field. His patents and work at Applied Materials, Inc. highlight his role as a significant inventor in this specialized area.