Mark Y Tian

Title: Mark Y Tian: Innovator in Rapid Thermal Processing

Introduction

Mark Y Tian is a notable inventor based in Fairfax Station, VA (US). He has made significant contributions to the field of rapid thermal processing and bonding of materials. With a total of 2 patents, his work focuses on advancing technology in semiconductor manufacturing and material processing.

Latest Patents

One of Mark Y Tian's latest patents is titled "Method and apparatus for rapid thermal processing and bonding of materials using RF and microwaves." This innovative method and apparatus enable rapid and selective heating of materials through variable frequency RF and microwaves. The apparatus utilizes variable frequency solid-state electronics as a microwave power source, along with a novel microwave heating head designed to couple microwave energy to target materials. A match-up network is incorporated to tune the frequency and ensure impedance matching between the microwave source and the load. An electronic and computer measurement and control system is employed to monitor and control the microwave heating process. The method teaches inductive microwave coupling for thin conductive materials, such as metal films and impurity-doped silicon wafers, as well as capacitive microwave coupling for dielectric materials like glass and ceramics. This technology allows for ultra-high heating speeds and temperatures, facilitating rapid thermal processing of semiconductors and other materials. It also enables the use of high melting temperature bonding materials for strong bonding and sealing of MEMS and integrated circuits, while providing high interconnection density without the need for solder bumps.

Career Highlights

Mark Y Tian has established himself as a key figure in the field of material processing. His innovative approaches have led to advancements that enhance the efficiency and effectiveness of semiconductor manufacturing processes. His work is characterized by a commitment to pushing the boundaries of technology in this critical area.

Collaborations

Mark Y Tian collaborates with his coworker, Yonglai Tian, to further explore and develop innovative solutions in their field. Their combined expertise contributes to the advancement of technology in rapid thermal processing.

Conclusion

Mark Y Tian's contributions to the field of rapid thermal processing and bonding of materials highlight his innovative spirit and dedication to advancing technology. His patents reflect a deep understanding of the complexities involved in semiconductor manufacturing, making him a valuable inventor in this domain.