This inventor holds 9 USPTO granted patents. Top assignees: General Signal Corporation, Applied Materials, Inc.. Active years: 1987-2004.
Company Filing History:
Years Active: 1987-2004
Title: Mark W Miller: Innovator in Integrated Processing Systems
Introduction
Mark W Miller is a notable inventor based in Burlington, MA (US), recognized for his contributions to integrated processing systems. With a total of 9 patents, Miller has made significant advancements in the field of wafer processing technology.
Latest Patents
One of Miller's latest patents is an integrated processing system featuring multiple reactors connected to a central chamber. This innovative system includes a wafer queuing station and several plasma reactors attached to the peripheral walls of a central vacuum chamber. Vacuum valves effectively separate the central chamber from both the queuing station and the plasma reactors. Additionally, a wafer transfer arm capable of R-&THgr; motion allows for the transfer of wafers between the queuing station and any of the plasma reactors, facilitating both single-step and multi-step processes.
Career Highlights
Throughout his career, Mark W Miller has worked with prominent companies such as General Signal Corporation and Applied Materials, Inc. His experience in these organizations has contributed to his expertise in developing advanced processing systems.
Collaborations
Miller has collaborated with notable individuals in the industry, including Arthur W Zafiropoulo and Joseph D Napoli. These partnerships have likely enhanced his innovative capabilities and broadened his impact on the field.
Conclusion
Mark W Miller's work in integrated processing systems showcases his dedication to innovation and technology. His patents and collaborations reflect a commitment to advancing the industry and improving wafer processing techniques.