Schenectady, NY, United States of America

Mark L Lenhardt


Average Co-Inventor Count = 6.0

ph-index = 2

Forward Citations = 19(Granted Patents)


Company Filing History:


Years Active: 2017-2021

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6 patents (USPTO):

Title: Mark L Lenhardt: Innovator in Chamferless Via Structures

Introduction

Mark L Lenhardt is a notable inventor based in Schenectady, NY (US). He has made significant contributions to the field of semiconductor manufacturing, particularly with his innovative approaches to via structures. With a total of six patents to his name, Lenhardt's work has had a considerable impact on the industry.

Latest Patents

Lenhardt's latest patents focus on chamferless via structures and methods of manufacture. One of his patents describes a method that includes forming at least one self-aligned via within dielectric material. The process involves plugging the via with material, forming a protective sacrificial mask over the plugged material, and creating trenches within the dielectric material while protecting the plugged material. The final steps include removing the mask and filling the wiring via and trenches with conductive material. Another patent outlines a similar method for non-self-aligned vias, emphasizing the innovative techniques that enhance manufacturing efficiency and reliability.

Career Highlights

Throughout his career, Mark L Lenhardt has worked with prominent companies in the technology sector. He has been associated with International Business Machines Corporation (IBM) and Globalfoundries Inc., where he has contributed to various projects and advancements in semiconductor technology. His expertise and innovative mindset have positioned him as a valuable asset in these organizations.

Collaborations

Lenhardt has collaborated with several professionals in his field, including Frank Wilhelm Mont and Brown Cornelius Peethala. These collaborations have likely fostered an environment of innovation and creativity, leading to the development of groundbreaking technologies.

Conclusion

Mark L Lenhardt's contributions to chamferless via structures and his work with leading technology companies highlight his importance as an inventor in the semiconductor industry. His innovative methods continue to influence manufacturing processes and pave the way for future advancements.

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