This inventor holds 1 USPTO granted patent. Top assignee: Novellus Systems Incorporated. Active years: 2002.
Company Filing History:
Years Active: 2002
Title: Innovations by Mark Fissel in Semiconductor Technology
Introduction
Mark Fissel is an accomplished inventor based in Danville, California. He has made significant contributions to the field of semiconductor technology, particularly in the area of wafer processing. His innovative approach has led to the development of a unique apparatus that enhances the degassing process of semiconductor wafers.
Latest Patents
Mark Fissel holds a patent for an "Apparatus and method for enhanced degassing of semiconductor wafers for increased throughput." This invention features a multi-level shelf degas station that utilizes at least two heaters integrated within wafer holding shelves or slots. The design ensures that semiconductor wafers do not come into direct contact with the heater shelves, allowing for efficient conduction heating. The process involves positioning the heater and wafer holder assembly through each wafer slot sequentially. If a degassed wafer is present, a transfer chamber arm removes it, while a loader arm places a new wafer in the available slot. This innovative method allows for individual processing of wafers while maintaining the efficiency of the overall system. Air-cooling chambers are also incorporated to facilitate cooling and ease of maintenance.
Career Highlights
Mark Fissel is currently employed at Novellus Systems Incorporated, where he continues to push the boundaries of semiconductor technology. His work has been instrumental in improving the throughput and efficiency of wafer processing systems.
Collaborations
Throughout his career, Mark has collaborated with notable colleagues, including Kenneth K Barber and Soo Yun Joh. These partnerships have contributed to the advancement of technologies in the semiconductor industry.
Conclusion
Mark Fissel's innovative contributions to semiconductor technology, particularly through his patented methods, have significantly impacted the industry. His work exemplifies the importance of innovation in enhancing manufacturing processes.