This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: University of Central Florida Research Foundation Inc.. Active years: 2000.
Company Filing History:
Years Active: 2000
Title: Innovative Contributions of Mark A. Klosner in Capillary Discharge EUV Lamp Technology
Introduction: Mark A. Klosner, an inventive mind based in Orlando, Florida, has made significant strides in the field of extreme ultraviolet (EUV) technology. With a valuable patent under his name, Klosner has contributed to advancements that hold great potential for various high-tech applications.
Latest Patents: Klosner's notable patent is titled "Capillary discharge extreme ultraviolet lamp source for EUV." This innovative invention focuses on the operational conditions of a pulsed capillary discharge lamp specifically designed for EUV lithography and numerous applications beyond, including resist exposure tools, microscopy, interferometry, metrology, biology, and pathology. The patent details techniques to combat challenges such as capillary bore erosion, pressure pulse generation, and debris formation, all of which are crucial for the efficiency and effectiveness of capillary discharge-powered lamps operating in the EUV range. Additionally, Klosner's patent describes various materials and configurations for constructing capillary discharge devices essential for EUV lithography and related fields.
Career Highlights: Mark A. Klosner is associated with the University of Central Florida, where his work centers around advanced technologies that push the boundaries of current scientific applications. His expertise in the field of EUV lamps has established him as a prominent figure in engineering innovative light-emitting technologies, vital for the progression of microfabrication processes.
Collaborations: Throughout his career, Klosner has collaborated with esteemed colleagues such as William T. Silfvast and Gregory Michael Shimkaveg. These partnerships have enriched his research efforts and fostered a collaborative environment for advancing EUV technology, further enhancing the potential applications of Klosner's inventions in various industries.
Conclusion: Mark A. Klosner's innovative contributions to capillary discharge extreme ultraviolet lamp technology signify a remarkable achievement in the field of EUV applications. His patented invention not only addresses critical challenges within the industry but also opens the door to future innovations that can impact several scientific and technological arenas. Klosner's dedication to advancing this field underscores the essential role that inventors play in shaping the future of technology.